Arrayed, Piezoelectrically-Actuated Mirrors and Gratings for Spectrometer
نویسندگان
چکیده
This paper describes a technology for a compact spectrometer based on a 2D piezoelectric mirror and/or grating array. The piezoelectric mirror/grating array is composed of angularly movable, 2-D array of micromirrors/microgratings that is supported on piezoelectric cantilevers, and can be driven piezoelectrically with controllable tilt angle in both upward and downward directions. A large reflecting/diffractive surface is obtained through a combination of the smallsized mirrors/gratings that are surface-micromachined without fabrication difficulties associated with a large size mirror/grating.
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تاریخ انتشار 2010